Force sensor, Type 9212

Type 9212 is a compact piezoelectric force sensor suitable for applications requiring high sensitivity and fast response.

It is commonly used in chip bonder heads, semiconductor equipment and low-force pressing mechanisms.

Typical applications

• Chip bonder heads
• Semiconductor equipment
• Low-force press monitoring
• High-sensitivity test benches

Key features

• Compact size
• Measures static and dynamic forces
• High-frequency response
• Suitable for precise low-force applications

Main specifications

• Compression force up to 5,000 lbf
• Tension force up to 500 lbf
• Sensitivity about -50 pC/lbf
• Non-linearity around ±0.5% FSO
• Natural frequency around 70 kHz

HIKI TEC supports Kistler solutions in Vietnam with application consulting, integration support and technical assistance.